Abstract

Single-crystallinesilicon (sc-Si) is the dominant semiconductor material for the modernelectronics industry. Despite their excellent photoelectric and electronicproperties, the rigidity, brittleness, and nontransparency of commonly usedsilicon wafers limit their application in transparent flexible optoelectronics.In this study, a new type of Si microstructure, named single-crystalline Siframeworks (sc-SiFs), is developed, through a combination of wet-etching andmicrofabrication technologies. The sc-SiFs are self-supported, flexible,lightweight, tailorable, and highly transparent. They can withstand a smallbending radius of less than 0.5 mm and have a transparency of up to 96% in allwavelength ranges, owing to the hollowed-out framework structures. Thus, thesc-SiFs provide a new platform for high-performance transparent flexibleoptoelectronics. Taking transparent flexible photodetectors (TFPDs) as anexample, substrate-free and self-driven TFPDs are achieved based on thesc-SiFs. The devices exhibit superior performance compared to other reportedTFPDs and reveal the great potential for integrated optoelectronic applications.The development of sc-SiFs paves the way toward the fabrication ofhigh-performance transparent flexible devices for a host of applications,including e-skins, the Internet of Things, transparent flexible displays, andartificial visual cortexes.

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