Instrument name | Parylene Deposition System |
Manufacturer | KARYNANOTECH |
Model | KR350HS |
Specifications | Vacuum pump: 28 m3/H, ultimate: 0.75 Pa Cold trap: ≤ -90 °C Cracking furnace: 650 ℃~800 ℃ Evaporation temperature: room temperature ~ 200 °C, deviation: ±2 °C |
Function and applications | Chemical vapour deposition for the preparation of Parylene coatings for the coating and protection of circuit boards, microelectronic semiconductor products, medical products, etc., for the preparation of transparent flexible substrates, etc. |
Contact | Yanyun Liu |
Tel. | 65883196 |
yyliu1@suda.edu.cn |
Editor: Wenchang Zhu