Instrument name | Surface Profiler |
Model | D-10 |
Manufacturer | KLA-Tencor |
Specifications | Minimum positive pressure: 0.03 mg Optimal Vertical resolution: 0.38 A Maximum vertical Measurement Range: 800 um |
Applications and Uses | The surface profiler is used for various materials film thickness measurement. |
Contacts | Xumin Yang |
Contact number | 65884226 |
Editor: Xumin Yang